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65-3531-56 Silicon Wafer with Thermocouple AW Series 0~500°C Insulating Coating Material: Alumina Fiber Sleeve K Type AW-0505K-A-TS1-ANP
Product Description
Product Model: 65-3531-56Product Brand: ANRITSU METER C […]
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Product Details
Product Model: 65-3531-56
Product Brand: ANRITSU METER CO., LTD.
Features
- The AW Series is a "silicon wafer with thermocouple" that is indispensable for developing semiconductor manufacturing equipment, setting process conditions, and measuring temperature distribution.
- [Application] Stage temperature measurement in a resist device in a semiconductor manufacturing process using a silicon wafer, etc.
- [Attention] Certificate of examination is included as standard.
Spec
- Operating temperature range (°C): 0~500
- Tolerance at 100~200 deg. C (deg. C): ±5.0
- Thermocouple Type: K Type
- Wafer size (inches): 5
- Number of sensors: 5
- Insulation Coating Material: Alumina Fiber Sleeve
- Cord length (m): 1
- Plug Shape: Mini Plug
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